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Subject: Atomic layer deposition
Subject: Atomic layer deposition
FAST ID: 1909248 |
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Academic Publications
Single Atomic Layer Ferroelectric on Silicon
Mehmet Dogan
; et al.
Nano Letters
, 2017,
journal article
,
Department of Physics
Atomic layer deposition
Ferroelectric thin films
Interfaces (Physical sciences)
Semiconductors
Silicon
MoS2 functionalization for ultra-thin atomic layer deposited dielectrics
Angelica Azcatl; Stephen McDonnell;
Santosh KC
; et al.
Appl. Phys. Lett.
, 2014,
journal article
,
Grants Research and Enterprise Writing (GREW) Fellows
Atomic layer deposition
Molybdenum disulfide
Nanotechnology
Thin films
